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   MDA-40FA  MDA-80FA  MDA-12FA
  MDA-40FA MDA-80FA MDA-12FA
Type Full automatic Full automatic Full automatic
Mask size up to 5" x 5" up to 9" x 9" up to 14" x 14"
Substrate size 2", 4" 8"  12" circle
UV lamp & Power 350W & power supply 2kW & power supply 5kW lamp & power supply
Uniform beam size 6.25" x 6.25" 10.25" x 10.25" 13.25" x 13.25"
Beam Uniformity <±3% <±5% <±5%
Beam wavelength 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm
365nm Intensity ~25mW/cm2 ~25mW/cm2 25~60mW/cm2 (5kW)
Alignment accuracy 1um 1um 1um
Process resolution 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized) x,y,z & θ (Motorized) x,y,z & θ (Motorized)
Pre-aligner ±50um ±50um ±50um
Frame  Anti-Vibration system Anti-Vibration system Anti-Vibration system
Options UV Intensity meter
UV-LED(365nm) exposure module
etc.		 UV Intensity meter
etc.		 UV Intensity meter
etc.

 



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Mask Aligner and Spin Coater equipment