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Coating article

 

  Spin-1200D Spin-3000D Spin-3000A
  Spin-1200D Spin-3000D Spin-3000A
Type Spin system Spin system Spin system
Substrate size  piece ~ up to 4" circle piece ~ up to 6" circle piece ~ up to 8"
circle
Rotation speed DC Servo Motor 300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor		 300 ~ 8,000rpm(@
without load) an error of less than 1%
AC Servo Motor(100W/400W)
Spin state 50steps, 20recipes (digital type) 50steps, 20recipes (digital type) 50steps, 20recipes (digital type)
Bowl size 9", Acetal 12", Stainless steel 12", Stainless steel
Acceleration / Deceleration rate Variable Variable Variable
Chuck material Anodized AL, Acetal Anodized AL, Acetal Anodized AL, Acetal
Electric power 220V, 5A 220V, 5A 220V, 5A
Oiless vacuum pump pressure -650mmHg -650mmHg -650mmHg
Dimensions(mm) 230(D)x340(W)x260(H) 390(D)x570(W)
x280(H)		 390(D)x570(W)
x400(H)
Options • • •

 

  Spin-5000A Spin-1200T Spin-3000T
  Spin-5000A Spin-1200T Spin-3000T
Type Spin system Spin system Spin system
Substrate size  piece ~ up to 12" circle piece ~ up to 4" circle piece ~ up to 8" circle
Rotation speed AC Servo Motor (400W) 300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor		 AC Servo Motor(100W/400W)
Spin state 50steps, 20recipes (digital type) 50steps, 20recipes (digital type) 50steps, 20recipes (digital type)
Bowl size 12", Stainless steel 9", Acetal 12", Stainless steel
Acceleration / Deceleration rate Variable Variable Variable
Chuck material
Anodized AL, Acetal Anodized AL, Acetal Anodized AL, Acetal
Electric power 220V, 5A 220V, 5A 220V, 5A
Oiless vacuum pump pressure -650mmHg -650mmHg -650mmHg
Dimensions(mm) • • •
Options Number of Dispenser nozzle
Type of chemical
Drain type
etc.		 •  Number of Dispenser nozzle
Type of chemical
Drain type
etc.

 



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Mask Aligner and Spin Coater equipment