Coating ![article](lib_icon/icon0001.gif)
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![Spin-1200D](http://www.midas-system.com/board/image.php?board=products_en&no=20) |
![Spin-3000D](http://www.midas-system.com/board/image.php?board=products_en&no=19) |
![Spin-3000A](http://www.midas-system.com/board/image.php?board=products_en&no=18) |
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Spin-1200D |
Spin-3000D |
Spin-3000A |
Type |
Spin system |
Spin system |
Spin system |
Substrate size |
piece ~ up to 4" circle |
piece ~ up to 6" circle |
piece ~ up to 8"
circle |
Rotation speed |
DC Servo Motor |
300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor |
300 ~ 8,000rpm(@
without load) an error of less than 1%
AC Servo Motor(100W/400W) |
Spin state |
50steps, 20recipes (digital type) |
50steps, 20recipes (digital type) |
50steps, 20recipes (digital type) |
Bowl size |
9", Acetal |
12", Stainless steel |
12", Stainless steel |
Acceleration / Deceleration rate |
Variable |
Variable |
Variable |
Chuck material |
Anodized AL, Acetal |
Anodized AL, Acetal |
Anodized AL, Acetal |
Electric power |
220V, 5A |
220V, 5A |
220V, 5A |
Oiless vacuum pump pressure |
-650mmHg |
-650mmHg |
-650mmHg |
Dimensions(mm) |
230(D)x340(W)x260(H) |
390(D)x570(W)
x280(H) |
390(D)x570(W)
x400(H) |
Options |
• |
• |
• |
|
![Spin-5000A](http://www.midas-system.com/board/image.php?board=products_en&no=26) |
![Spin-1200T](http://www.midas-system.com/board/image.php?board=products_en&no=27) |
![Spin-3000T](http://www.midas-system.com/board/image.php?board=products_en&no=28) |
|
Spin-5000A |
Spin-1200T |
Spin-3000T |
Type |
Spin system |
Spin system |
Spin system |
Substrate size |
piece ~ up to 12" circle |
piece ~ up to 4" circle |
piece ~ up to 8" circle |
Rotation speed |
AC Servo Motor (400W) |
300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor |
AC Servo Motor(100W/400W) |
Spin state |
50steps, 20recipes (digital type) |
50steps, 20recipes (digital type) |
50steps, 20recipes (digital type) |
Bowl size |
12", Stainless steel |
9", Acetal |
12", Stainless steel |
Acceleration / Deceleration rate |
Variable |
Variable |
Variable |
Chuck material
|
Anodized AL, Acetal |
Anodized AL, Acetal |
Anodized AL, Acetal |
Electric power |
220V, 5A |
220V, 5A |
220V, 5A |
Oiless vacuum pump pressure |
-650mmHg |
-650mmHg |
-650mmHg |
Dimensions(mm) |
• |
• |
• |
Options |
Number of Dispenser nozzle
Type of chemical
Drain type
etc. |
• |
Number of Dispenser nozzle
Type of chemical
Drain type
etc. |
|
Mask Aligner and Spin Coater equipment