ReadyPlanet.com
dot
Laser and Photonics
dot
bulletLaser Diode and DPSS Laser system
bulletHigh Power Tunable External Cavity Diode Lasers
bulletNd:YAG Laser Systems
bulletSpectral Products & CVI Laser
bulletExcimer Lasers
bulletSynrad Lasers
dot
Calibration and Measuring Instruments
dot
bulletGauge Calibration Instruments
dot
Flatness and Roughness Interferometer
dot
bulletCorning Tropel Interferometer system
bulletMask Aligner & Spin Coater equipment
dot
Imaging and Spectroscopy system
dot
bulletPCO Imaging High Performance Camera system
bulletCustomer Laser Spectroscopy and High Resolution Imaging System
bulletCryogenic
dot
Industrial and Manufacturing
dot




MDA-60MS article
MDA-60MS
Easy operation & Installation
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
 
Photo-litho / Exposure System / Manual - MDA-60MS

 

  • specification
     
    • Type Manual (PC control)
    Mask size up to 7" x 7"
    Substrate size piece to 6" x 6"
    UV lamp & Power 1kW & power supply
    Uniform beam size 7.25" x 7.25"
    Beam Uniformity <±5%
    Beam wavelength 350 ~ 450nm
    365nm Intensity 15 ~ 25mW/cm2
    Alignment accuracy 1um
    Process resolution 1um@1um PR thickness with vacuum contact
    Process mode Soft, Hard, Vacuum contact & Proximity
    Substrate chuck moving x,y(Manual), z, θ (Motorized)
    Options
    CCD BSA
    UV Intensity meter
    etc.
    Frame Anti vibration table

 

 



« Back


Mask Aligner and Spin Coater equipment