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MDA-80SA article
MDA-80SA
Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Motorized joystick control
 
Photo-litho / Exposure System / Manual - MDA-80SA

 

  • specification
     
    • Type Semi-Auto (Joystick control)
    Mask size up to 9" x 9"
    Substrate size piece to 8" x 8"
    UV lamp & Power 2kW & power supply
    Uniform beam size 10.25" x 10.25"
    Beam Uniformity <±3~5%
    Beam wavelength 350 ~ 450nm
    365nm Intensity 15 ~ 25mW/cm2
    Alignment accuracy 1um
    Process resolution 1um@1um PR thickness with vacuum contact
    Process mode Soft, Hard, Vacuum contact & Proximity
    Frame Anti-Vibration system
    Options
    CCD BSA
    UV Intensity meter
    etc.

 

 



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Mask Aligner and Spin Coater equipment