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Spin-1200D article
Spin-1200D
Compact unit for various coating solutions
Programmable Recipe management
Easy operation
 
Photo-litho / Spin System / Coating - Spin-1200D

 

  • specification
     
    • Type Spin system
    Substrate size piece ~ up to 4" circle
    Rotation speed DC Servo Motor
    Spin state 50steps, 20recipes (digital type)
    Bowl size 9", Acetal
    Acceleration / Deceleration rate Variable
    Chuck material Anodized AL, Acetal
    Electric power 220V, 5A
    Oiless vacuum pump pressure -650mmHg
    Dimensions(mm) 230(D)x340(W)x260(H)

 



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Mask Aligner and Spin Coater equipment