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Spin-5000A article
Spin-5000A
Programmable Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl
 
Photo-litho / Spin System / Coating - Spin-5000A

 

  • specification
     
    • Type Spin system
    Substrate size piece ~ up to 12" circle
    Rotation speed AC Servo Motor (400W)
    Spin state 50steps, 20recipes (digital type)
    Bowl size 12", Stainless steel
    Acceleration / Deceleration rate Variable
    Chuck material Anodized AL, Acetal
    Electric power 220V, 5A
    Oiless vacuum pump pressure -650mmHg
    Options
    Number of Dispenser nozzle
    Type of chemical
    Drain type
    etc.

 

 



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Mask Aligner and Spin Coater equipment