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TSP article

 

  Film type TSP aligner Cell type TSP aligner
  Film type TSP aligner Cell type TSP aligner
Sample size 500 x 500 square 4 ~ 7” square
Alignment accuracy ± 1.5um ± 1.5um
Resolution L/S 5~8um (Aspect ratio below 1) L/S 5~8um (Aspect ratio below 1)
Beam Intensity < 20mW/cm2 @ Broad band) < 20mW/cm2 @ Broad band)
Beam Uniformity < 5% < 5%

 



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Mask Aligner and Spin Coater equipment