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UV-LED article

 

   MDA-400LJ
  MDA-400LJ
Type Fully manual
Mask size up to 5" x 5"
Substrate size piece to 4"
UV lamp & Power UV-LED & power supply
Uniform beam size 4.25" x 4.25"
Beam Uniformity 365nm Only
365nm Intensity ~20mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ 
Options etc.


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Mask Aligner and Spin Coater equipment