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Laser and Photonics |
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Calibration and Measuring Instruments |
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Flatness and Roughness Interferometer |
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Imaging and Spectroscopy system |
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Industrial and Manufacturing |
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Semiconductor Excimers ![]()
Lasers for Semiconductor Applications (SE-Version)
THE ULTIMATE IN EXCIMER LASER TECHNOLOGY
Semiconductor processing, mask inspection, microlithography and metrology lasers are available which meet CE mark and SEMI S2 standards. All semiconductor excimer lasers use the latest total metal/ceramic technology for maximum laser lifetime with minimal service. SE-version excimer lasers feature clean room packaging, longer chamber lifetimes and longer gas lifetimes than standard excimer lasers.
SE-Version Features
The EX10SE Semiconductor Excimer Laser
SE Versions are available for EX10, EX50, EX100 and EX100H products.
The EX10SE Semiconductor Excimer Laser
SE Versions are available for EX10, EX50, EX100 and EX100H products. EX10SE specifications
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